In　order　to　identify　the　inherent　small　vibration　of　the　aerostatic　slider　caused　by　gas　film,　dynamic　behaviour　for　the　aerostatic　slider　has　been　analysed　both　mathematically　and　experimentally.　The　gas　flow　state　has　been　analysed　with　velocity　slip　method.　Dynamic　equation　of　the　aerostatic　slider　has　been　established　according　to　the　calculated　performance　parameters.　The　frequency　characteristics　for　the　pneumatic　self-induced　oscillation　of　aerostatic　sliders　have　been　measured　signal　by　piezoelectric　acceleration　sensor.　The　basic　frequencies　of　slider　system　have　been　identified　according　to　Fourier　transformation,　which　is　consistent　with　the　values　deduced　with　the　theory　equation.　Copyright　©　2016　Inderscience　Enterprises　Ltd.