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Author:

Sun, W. (Sun, W..) | Ji, L. (Ji, L..) | Lin, Z. (Lin, Z..) | Zhang, L. (Zhang, L..) | Wang, Z. (Wang, Z..) | Qin, W. (Qin, W..) | Yan, T. (Yan, T..)

Indexed by:

EI Scopus SCIE

Abstract:

Ultrafast laser is expected as a promising strategy for micro-LEDs (µ-LEDs) transfer due to its inherent property of suppressing thermal effects. However, its ultrahigh peak power and the unclear transfer mechanism make its transfer quality and efficiency unsatisfactory. Here, the study reports the high-precision mass transfer of 20 µm fine-pitch µ-LEDs via in situ nanoparticles (NPs) resonance enhancement in burst mode ultraviolet picosecond laser irradiation. This technique suppresses the thermal melting effect and rapid cooling behavior of plasma by temporal modulation of the burst mode, generating NPs-induced resonance enhancement that accurately and controllable drives a single unit up to tens of thousands of µ-LEDs. The transfer of large µ-LED arrays with more than 180 000 chips is also demonstrated, showing a transfer yield close to 99.9%, a transfer speed of 700 pcs s−1, and a transfer error of <±1.2 µm. The transferred µ-LEDs perform excellent optoelectronic properties and enable reliable device operation regardless of complex strain environments, providing a reliable strategy for preparing broader classes of 3D integrated photonics devices. © 2024 Wiley-VCH GmbH.

Keyword:

laser mass transfer microscale light-emitting diodes burst mode plasmon resonance flexible electronics

Author Community:

  • [ 1 ] [Sun W.]Institute of Laser Engineering, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 2 ] [Sun W.]Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing, 100124, China
  • [ 3 ] [Sun W.]Beijing Engineering Research Center of Laser Applied Technology, Beijing, 100124, China
  • [ 4 ] [Ji L.]Institute of Laser Engineering, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 5 ] [Ji L.]Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing, 100124, China
  • [ 6 ] [Ji L.]Beijing Engineering Research Center of Laser Applied Technology, Beijing, 100124, China
  • [ 7 ] [Lin Z.]Institute of Laser Engineering, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 8 ] [Lin Z.]Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing, 100124, China
  • [ 9 ] [Lin Z.]Beijing Engineering Research Center of Laser Applied Technology, Beijing, 100124, China
  • [ 10 ] [Zhang L.]Institute of Laser Engineering, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 11 ] [Zhang L.]Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing, 100124, China
  • [ 12 ] [Zhang L.]Beijing Engineering Research Center of Laser Applied Technology, Beijing, 100124, China
  • [ 13 ] [Wang Z.]Institute of Laser Engineering, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 14 ] [Wang Z.]Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing, 100124, China
  • [ 15 ] [Wang Z.]Beijing Engineering Research Center of Laser Applied Technology, Beijing, 100124, China
  • [ 16 ] [Qin W.]Institute of Laser Engineering, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 17 ] [Qin W.]Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing, 100124, China
  • [ 18 ] [Qin W.]Beijing Engineering Research Center of Laser Applied Technology, Beijing, 100124, China
  • [ 19 ] [Yan T.]Institute of Laser Engineering, School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 20 ] [Yan T.]Key Laboratory of Trans-Scale Laser Manufacturing Technology of Ministry of Education, Beijing, 100124, China
  • [ 21 ] [Yan T.]Beijing Engineering Research Center of Laser Applied Technology, Beijing, 100124, China

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Source :

Small

ISSN: 1613-6810

Year: 2024

Issue: 27

Volume: 20

1 3 . 3 0 0

JCR@2022

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 7

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

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