Optical　waveguides　play　an　important　role　in　the　fields　of　optical　communications　and　optical　sensing.　As　optical　waveguide　substrate　materials,　yttrium　aluminum　garnet　(YAG)　crystals　have　a　high　refractive　index,　high　thermal　conductivity,　high　optical　quality,　and　good　chemical　stability.　However,　YAG　crystals　are　difficult　to　fabricate　since　they　are　chemically　inactive　and　have　a　Mohs　hardness　of　8.5.　This　article　has　proposed　a　method　of　rapidly　preparing　microhole　arrays　on　YAG　crystals　using　a　femtosecond　laser　single-pulse　Bessel　beam　combined　with　wet　etching　technology.　The　experiment　used　a　titanium　sapphire　re-Amplified　femtosecond　laser　with　a　central　wavelength　of　800nm　and　a　pulse　width　of　50fs.　The　femtosecond　laser　was　modulated　into　femtosecond　Bessel　light　using　the　axicon,　and　the　beam　was　focused　into　the　interior　of　the　YAG　crystal　sample　through　a　focusing　objective.　The　sample　was　placed　on　a　precision　three-dimensional　displacement　platform,　and　the　arrangement　of　microhole　array　distribution　could　be　achieved　by　changing　parameters　such　as　repetition　frequency,　scanning　speed,　and　scanning　direction.　Subsequently,　phosphoric　acid　solution　was　used　to　corrode　the　samples　to　optimize　the　pore　size　and　morphology　features.　By　systematically　studying　and　summarizing　the　effects　of　parameters　such　as　power,　focusing　position　on　the　morphology,　depth,　and　aspect　ratio　of　microholes.　The　optimal　parameter　range　was　integrated　to　regulate　the　microhole　array　structure.　Large-Area　uniform　microhole　array　with　an　aspect　ratio　of　approximately　300:1　and　good　taper　was　finally　obtained.　　©　COPYRIGHT　SPIE.　Downloading　of　the　abstract　is　permitted　for　personal　use　only.