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Author:

Yang, Heng (Yang, Heng.) | Yu, Yuan (Yu, Yuan.) | Zhang, Tong (Zhang, Tong.) | Ma, Shufang (Ma, Shufang.) | Chen, Lin (Chen, Lin.) | Xu, Bingshe (Xu, Bingshe.) | Wang, Zhiyong (Wang, Zhiyong.)

Indexed by:

Scopus SCIE

Abstract:

High-aspect-ratio microholes, the fundamental building blocks for microfluidics, optical waveguides, and other devices, find wide applications in aerospace, biomedical, and photonics fields. Yttrium aluminum garnet (YAG) crystals are commonly used in optical devices due to their low stress, hardness, and excellent chemical stability. Therefore, finding efficient fabrication methods to produce high-quality microholes within YAG crystals is crucial. The Bessel beam, characterized by a uniform energy distribution along its axis and an ultra-long depth of focus, is highly suitable for creating high-aspect-ratio structures. In this study, an axicon lens was used to shape the spatial profile of a femtosecond laser into a Bessel beam. Experimental verification showed a significant improvement in the high aspect ratio of the microholes produced in YAG crystals using the femtosecond Bessel beam. This study investigated the effects of the power and defocus parameters of single-pulse Bessel beams on microhole morphology and size, and microhole units with a maximum aspect ratio of more than 384:1 were obtained. Based on these findings, single-pulse femtosecond Bessel processing parameters were optimized, and an array of 181 x 181 microholes in a 400 mu m thick YAG crystal was created in approximately 13.5 min. The microhole array had a periodicity of 5 mu m and a unit aspect ratio of 315:1, with near-circular top and subface apertures and high repeatability.

Keyword:

Bessel beam microhole array femtosecond lasers laser processing yttrium aluminum garnet

Author Community:

  • [ 1 ] [Yang, Heng]Shaanxi Univ Sci & Technol, Mat Inst Atom & Mol Sci, Xian 710021, Peoples R China
  • [ 2 ] [Yu, Yuan]Shaanxi Univ Sci & Technol, Mat Inst Atom & Mol Sci, Xian 710021, Peoples R China
  • [ 3 ] [Ma, Shufang]Shaanxi Univ Sci & Technol, Mat Inst Atom & Mol Sci, Xian 710021, Peoples R China
  • [ 4 ] [Xu, Bingshe]Shaanxi Univ Sci & Technol, Mat Inst Atom & Mol Sci, Xian 710021, Peoples R China
  • [ 5 ] [Wang, Zhiyong]Shaanxi Univ Sci & Technol, Mat Inst Atom & Mol Sci, Xian 710021, Peoples R China
  • [ 6 ] [Yang, Heng]Shaanxi Univ Sci & Technol, Sch Mat Sci & Engn, Xian 710021, Peoples R China
  • [ 7 ] [Zhang, Tong]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 8 ] [Chen, Lin]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 9 ] [Wang, Zhiyong]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Zhang, Tong]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China;;

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Source :

PHOTONICS

Year: 2024

Issue: 5

Volume: 11

2 . 4 0 0

JCR@2022

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count: 1

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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