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Author:

Li, Yuan (Li, Yuan.) | Ma, He (Ma, He.) (Scholars:马赫) | Shi, Run (Shi, Run.) | Wu, Yonghuang (Wu, Yonghuang.) | Feng, Shifeng (Feng, Shifeng.) | Fu, Yulan (Fu, Yulan.) | Wei, Yuanqi (Wei, Yuanqi.) | Zhao, Xuzhe (Zhao, Xuzhe.) | Dong, Kaichen (Dong, Kaichen.) | Jiang, Kaili (Jiang, Kaili.) | Liu, Kai (Liu, Kai.) | Zhang, Xinping (Zhang, Xinping.)

Indexed by:

EI Scopus SCIE

Abstract:

Modern optoelectronic devices trend toward greater flexibility, wearability, and multifunctionality, demanding higher standards for fabrication and operation temperatures. Vanadium dioxide (VO2), with its metal-insulator transition (MIT) at 68 degrees C, serves as a crucial functional layer in many optoelectronic devices. However, VO2 usually needs to grow at >450 degrees C in an oxygen-containing atmosphere and to function across its MIT temperature, leading to low compatibility with most optoelectronic devices, especially on flexible substrates. In this work, we report a layer-by-layer transfer method of wafer-scale tungsten-doped VO2 films, which enables sequential integration of the VO2 films with low MIT temperatures (down to 40 degrees C) onto arbitrary substrates. Notably, by stacking multiple VO2 films with different doped levels, a quasi-gradient-doped VO2 architecture can be achieved, effectively broadening the MIT temperature window and reducing the hysteresis of VO2. These integrated VO2 films find a wide scope of applications in flexible temperature indicator strips, infrared camouflage devices, nonreciprocal ultrafast light modulators, and smart photoactuators. Our work promotes the development of more flexible and tunable optoelectronic devices integrated with VO2.

Keyword:

wafer-scale transfer vertical integration tungsten doping vanadium dioxide phase transition

Author Community:

  • [ 1 ] [Li, Yuan]Beijing Univ Technol, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Ma, He]Beijing Univ Technol, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Feng, Shifeng]Beijing Univ Technol, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Fu, Yulan]Beijing Univ Technol, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Zhang, Xinping]Beijing Univ Technol, Inst Informat Photon Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Li, Yuan]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 7 ] [Ma, He]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 8 ] [Feng, Shifeng]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 9 ] [Fu, Yulan]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 10 ] [Zhang, Xinping]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China
  • [ 11 ] [Shi, Run]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
  • [ 12 ] [Wu, Yonghuang]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
  • [ 13 ] [Liu, Kai]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
  • [ 14 ] [Wei, Yuanqi]Tsinghua Univ, Collaborat Innovat Ctr Quantum Matter, Dept Phys, State Key Lab Low Dimens Quantum Phys, Beijing 100084, Peoples R China
  • [ 15 ] [Jiang, Kaili]Tsinghua Univ, Collaborat Innovat Ctr Quantum Matter, Dept Phys, State Key Lab Low Dimens Quantum Phys, Beijing 100084, Peoples R China
  • [ 16 ] [Zhao, Xuzhe]Tsinghua Univ, Tsinghua Berkeley Shenzhen Inst, Inst Data & Informat, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China
  • [ 17 ] [Dong, Kaichen]Tsinghua Univ, Tsinghua Berkeley Shenzhen Inst, Inst Data & Informat, Tsinghua Shenzhen Int Grad Sch, Shenzhen 518055, Peoples R China

Reprint Author's Address:

  • 马赫

    [Ma, He]Beijing Univ Technol, Inst Informat Photon Technol, Beijing 100124, Peoples R China;;[Zhang, Xinping]Beijing Univ Technol, Inst Informat Photon Technol, Beijing 100124, Peoples R China;;[Ma, He]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China;;[Zhang, Xinping]Beijing Univ Technol, Sch Phys & Optoelect Engn, Beijing 100124, Peoples R China;;[Liu, Kai]Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China

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Source :

ACS NANO

ISSN: 1936-0851

Year: 2025

Issue: 6

Volume: 19

Page: 6209-6220

1 7 . 1 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 9

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