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Author：

Saeed, S. (Saeed, S..) | Zia, A. (Zia, A..) | Tariq, S. (Tariq, S..) | Shakoor, U. (Shakoor, U..) | Liu, D. (Liu, D..) | Liu, R. (Liu, R..) | Cao, L. (Cao, L..) | Liao, C. (Liao, C..) | Wang, Z. (Wang, Z..)

Indexed by：

Scopus

Abstract：

This　paper　presents　an　innovative　approach　to　fabricating　dual-functional　hybrid　silicon　nanowire　(SiNW)　arrays　that　demonstrate　antireflection　and　Surface-Enhanced　Raman　Scattering　(SERS)　potentials.　Three-beam　laser　interference　lithography　(TBLIL)　is　used　to　create　interference　fringe　patterns　on　a　Si　substrate,　which　serves　as　a　template　for　subsequent　NWs　creation.　Subsequently,　metal-assisted　chemical　etching　(MACE)　selectively　etched　the　substrate　and　stimulated　the　formation　of　SiNWs　with　various　aspect　ratios.　The　morphological　and　optical　features　of　the　hybrid　SiNWs　were　characterized　by　scanning　electron　microscopy　(SEM),　finite　difference　time　domain　(FDTD),　and　Raman　spectroscopy.　The　resulting　structured　surface　morphology　effectively　reduced　the　reflection　losses　at　various　wavelengths.　The　Raman　spectra　of　rhodamine　6G　(R6G)　analytes　at　concentrations　of　10–4　to　10–8　are　examined,　indicating　that　the　Raman　signals　were　significantly　enhanced　and　had　long-term　stability　and　reliability.　The　Raman　characteristic　peaks　of　R6G　were　observed　at　620,　1361,　and　1660 cm−1,　which　are　potentially　useful　in　sensitive　chemical　sensors.　©　The　Author(s)　2025.

Keyword：

Metal assisted chemical etching (MACE) Hybrid silicon nanowires (SiNWs) SERS Laser Interference Lithography (LIL)

Author Community：

  • [ 1 ] [Saeed S.]Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, 518060, China
  • [ 2 ] [Saeed S.]Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen, 518060, China
  • [ 3 ] [Saeed S.]International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, 130022, China
  • [ 4 ] [Saeed S.]Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute of Changchun University of Science and Technology, Zhongshan, 528437, China
  • [ 5 ] [Zia A.]School of Physics and Optoelectronic Engineering, Beijing University of Technology, Beijing, 100124, China
  • [ 6 ] [Tariq S.]State Key Laboratory of Applied Optics, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun, 130033, China
  • [ 7 ] [Shakoor U.]Materials Simulation Research Laboratory (MSRL), Institute of Physics, Bahauddin Zakariya University, Multan, 60800, Pakistan
  • [ 8 ] [Liu D.]International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, 130022, China
  • [ 9 ] [Liu D.]Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute of Changchun University of Science and Technology, Zhongshan, 528437, China
  • [ 10 ] [Liu R.]International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, 130022, China
  • [ 11 ] [Liu R.]Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute of Changchun University of Science and Technology, Zhongshan, 528437, China
  • [ 12 ] [Cao L.]International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, 130022, China
  • [ 13 ] [Cao L.]Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute of Changchun University of Science and Technology, Zhongshan, 528437, China
  • [ 14 ] [Liao C.]Shenzhen Key Laboratory of Ultrafast Laser Micro/Nano Manufacturing, Key Laboratory of Optoelectronic Devices and Systems of Ministry of Education/Guangdong Province, College of Physics and Optoelectronic Engineering, Shenzhen University, Shenzhen, 518060, China
  • [ 15 ] [Liao C.]Shenzhen Key Laboratory of Photonic Devices and Sensing Systems for Internet of Things, Guangdong and Hong Kong Joint Research Centre for Optical Fibre Sensors, State Key Laboratory of Radio Frequency Heterogeneous Integration, Shenzhen University, Shenzhen, 518060, China
  • [ 16 ] [Wang Z.]International Research Centre for Nano Handling and Manufacturing of China, Changchun University of Science and Technology, Changchun, 130022, China
  • [ 17 ] [Wang Z.]Centre for Opto/Bio-Nano Measurement and Manufacturing, Zhongshan Institute of Changchun University of Science and Technology, Zhongshan, 528437, China

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Source ：

Journal of Materials Science: Materials in Engineering

ISSN： 3004-8958

Year： 2025

Issue： 1

Volume： 20

Cited Count：

WoS CC Cited Count：

SCOPUS Cited Count：

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 14

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