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The low ionization rate of Mg acceptors in the p-gallium nitride (GaN) layer is a critical factor accounting for the low current density of E-mode GaN p-FETs. In this work, polarization-enhanced technology was adopted to enhance the ionization rate of the p-GaN channel. High-performance recessed-gate E-mode GaN p-FETs were fabricated to enable GaN complementary logic (CL) circuits. During fabrication, the channel thickness (t(x)) is found to be a critical parameter that influences the device metrics. With a decrease in t(x) (i.e., larger recess depth), a more negative threshold voltage (V-th) is achieved; however, the trade-off is an increase in R-on. The E-mode GaN p-FET with t(x) = 32 nm exhibits a V-th of -1.1 V, a high current density of 17.7 mA/mm, a high I-on/I-off of 6.9 x 10(7), and a low subthreshold swing (SS) of 93 mV/dec. Furthermore, an E-mode n-channel p-GaN gate high electron mobility transistor (HEMT) was fabricated on the same epi-wafer, exhibiting a V-th of 1.3 V and an R-on of 6 Omega & sdot;mm. Finally, a GaN CL inverter was fabricated and demonstrated under V-DD = 6 V. Rail-to-rail voltage swing and low static power consumption were both achieved. This work further validates the feasibility of GaN CL integrated circuits and power integrated circuits (PICs).
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IEEE TRANSACTIONS ON ELECTRON DEVICES
ISSN: 0018-9383
Year: 2025
Issue: 5
Volume: 72
Page: 2259-2264
3 . 1 0 0
JCR@2022
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ESI Highly Cited Papers on the List: 0 Unfold All
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30 Days PV: 1
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