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Author:

Li, Teng (Li, Teng.) | Yu, Jingjing (Yu, Jingjing.) | Liu, Sihang (Liu, Sihang.) | Lao, Yunhong (Lao, Yunhong.) | Cui, Jiawei (Cui, Jiawei.) | Qi, Hengyuan (Qi, Hengyuan.) | Yang, Junjie (Yang, Junjie.) | Yang, Han (Yang, Han.) | Yang, Xuelin (Yang, Xuelin.) | Wang, Maojun (Wang, Maojun.) | Zhang, Yamin (Zhang, Yamin.) | Feng, Shiwei (Feng, Shiwei.) | Shen, Bo (Shen, Bo.) | Zhang, Meng (Zhang, Meng.) | Wei, Jin (Wei, Jin.)

Indexed by:

EI Scopus SCIE

Abstract:

The low ionization rate of Mg acceptors in the p-gallium nitride (GaN) layer is a critical factor accounting for the low current density of E-mode GaN p-FETs. In this work, polarization-enhanced technology was adopted to enhance the ionization rate of the p-GaN channel. High-performance recessed-gate E-mode GaN p-FETs were fabricated to enable GaN complementary logic (CL) circuits. During fabrication, the channel thickness (t(x)) is found to be a critical parameter that influences the device metrics. With a decrease in t(x) (i.e., larger recess depth), a more negative threshold voltage (V-th) is achieved; however, the trade-off is an increase in R-on. The E-mode GaN p-FET with t(x) = 32 nm exhibits a V-th of -1.1 V, a high current density of 17.7 mA/mm, a high I-on/I-off of 6.9 x 10(7), and a low subthreshold swing (SS) of 93 mV/dec. Furthermore, an E-mode n-channel p-GaN gate high electron mobility transistor (HEMT) was fabricated on the same epi-wafer, exhibiting a V-th of 1.3 V and an R-on of 6 Omega & sdot;mm. Finally, a GaN CL inverter was fabricated and demonstrated under V-DD = 6 V. Rail-to-rail voltage swing and low static power consumption were both achieved. This work further validates the feasibility of GaN CL integrated circuits and power integrated circuits (PICs).

Keyword:

Inverters inverter E-mode III-V semiconductor materials Current density Ionization Complementary logic (CL) Logic HEMTs Aluminum nitride polarization-enhanced Gallium nitride Threshold voltage Logic gates gallium nitride (GaN) p-FET

Author Community:

  • [ 1 ] [Li, Teng]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 2 ] [Qi, Hengyuan]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 3 ] [Zhang, Yamin]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 4 ] [Feng, Shiwei]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 5 ] [Zhang, Meng]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 6 ] [Yu, Jingjing]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 7 ] [Liu, Sihang]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 8 ] [Lao, Yunhong]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 9 ] [Cui, Jiawei]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 10 ] [Yang, Junjie]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 11 ] [Wang, Maojun]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China
  • [ 12 ] [Wei, Jin]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China

Reprint Author's Address:

  • [Zhang, Meng]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China;;[Wei, Jin]Peking Univ, Sch Integrated Circuits, Beijing 100871, Peoples R China

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Source :

IEEE TRANSACTIONS ON ELECTRON DEVICES

ISSN: 0018-9383

Year: 2025

Issue: 5

Volume: 72

Page: 2259-2264

3 . 1 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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