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Author:

Han, Jun (Han, Jun.) | Feng, Lei (Feng, Lei.) | Xing, Yan-Hui (Xing, Yan-Hui.) | Deng, Jun (Deng, Jun.) | Xu, Chen (Xu, Chen.) (Scholars:徐晨) | Shen, Guang-Di (Shen, Guang-Di.)

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EI Scopus PKU CSCD

Abstract:

GaN:Mg films have been grown on sapphire at low temperature by metal-organic chemical vapor deposition (MOCVD), and the properties of p-GaN:Mg films with different CP2Mg source fluxes and mol ratios of V and III (V/III) are studied. The results show that the screw dislocation density is decreased under increasing V/III ratio, and the quality of p-GaN crystal is improved. And when the V/III ratio is 3800, the CP2Mg flux is up to 170 sccm, and the p-GaN film, whose narrower full width at half maximum (FWHM) of (002) plane is 232″, is obtained. It also shows that the effects on decreasing edge dislocation only by increasing V/III ratio are not obvious.

Keyword:

Atomic force microscopy Sapphire Gallium nitride X ray diffraction Vapors Metallorganic chemical vapor deposition Magnesium printing plates Edge dislocations

Author Community:

  • [ 1 ] [Han, Jun]College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 2 ] [Feng, Lei]College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 3 ] [Xing, Yan-Hui]College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 4 ] [Deng, Jun]College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 5 ] [Xu, Chen]College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China
  • [ 6 ] [Shen, Guang-Di]College of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100124, China

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Source :

Journal of Optoelectronics Laser

ISSN: 1005-0086

Year: 2012

Issue: 4

Volume: 23

Page: 708-711

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 8

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