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Abstract:
GaN:Mg films have been grown on sapphire at low temperature by metal-organic chemical vapor deposition (MOCVD), and the properties of p-GaN:Mg films with different CP2Mg source fluxes and mol ratios of V and III (V/III) are studied. The results show that the screw dislocation density is decreased under increasing V/III ratio, and the quality of p-GaN crystal is improved. And when the V/III ratio is 3800, the CP2Mg flux is up to 170 sccm, and the p-GaN film, whose narrower full width at half maximum (FWHM) of (002) plane is 232″, is obtained. It also shows that the effects on decreasing edge dislocation only by increasing V/III ratio are not obvious.
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Journal of Optoelectronics Laser
ISSN: 1005-0086
Year: 2012
Issue: 4
Volume: 23
Page: 708-711
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 8
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