The　Cu2O　thin　films　were　deposited　by　radio-frequency(RF)　magnetron　sputtering　at　different　substrate　temperatures.　The　effect　of　substrate　temperature　on　the　crystal　structure,　optical　and　electrical　properties　were　studied.　The　X-ray　diffraction　patterns　show　that　the　single-phase　Cu2O　was　obtained　and　present　a　preferred　growth　orientation　(111)　as　the　substrate　temperatures　increased　from　500　K　to　800　K.　The　room　temperature　conductivity　and　optotical　bandgap(Eg)　increase　as　the　substrate　temperature　increasing.　The　biggest　Eg,　2.58　eV,　is　achieved　for　the　sample　prepared　at　800　K.