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Author:

Li, Zhi-Zhong (Li, Zhi-Zhong.) | Chen, Guang-Hua (Chen, Guang-Hua.) | He, Bin (He, Bin.) | Gao, Zhi-Hua (Gao, Zhi-Hua.) | Zhang, Xiao-Kang (Zhang, Xiao-Kang.) | Ding, Yi (Ding, Yi.) | Zhang, Yan (Zhang, Yan.) | Zhou, Tao (Zhou, Tao.) | Deng, Jin-Xiang (Deng, Jin-Xiang.) (Scholars:邓金祥)

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EI Scopus PKU CSCD

Abstract:

p-c-BN/p-Si thin film heterojunctions have been fabricated. BN films were deposited on p-type Si wafers using RF reactive sputter, and were doped into n-type semiconductor by implanting ions into them. The energy of implantation of ions is 100 keV, and the dose of implantation is 1015 ions/cm2. The p-c-BN/p-Si thin film heterojunctions have been annealed at the temperature of 800°C. The I-V (current-voltage) characteristics have obvious rectification. The fitting results show that current transporting model for the p-c-BN/p-Si thin film heterojunctions is the same as current-voltage equation of diode and the donor concentration is 2.04 × 1013/cm3 in the c-BN films.

Keyword:

Substrates Ion implantation Heterojunctions Thin films Annealing Beryllium Doping (additives) Silicon Electric properties Current voltage characteristics Cubic boron nitride

Author Community:

  • [ 1 ] [Li, Zhi-Zhong]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Chen, Guang-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [He, Bin]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Gao, Zhi-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Zhang, Xiao-Kang]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 6 ] [Ding, Yi]School of Physics, Lanzhou University, Lanzhou 730000, China
  • [ 7 ] [Zhang, Yan]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 8 ] [Zhou, Tao]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 9 ] [Deng, Jin-Xiang]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China

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Source :

Journal of Functional Materials

ISSN: 1001-9731

Year: 2006

Issue: SUPPL.

Volume: 37

Page: 213-215

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 6

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