• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

He, Bin (He, Bin.) | Chen, Guang-Hua (Chen, Guang-Hua.) | Gao, Zhi-Hua (Gao, Zhi-Hua.) | Deng, Jin-Xiang (Deng, Jin-Xiang.) (Scholars:邓金祥) | Zhang, Wen-Jun (Zhang, Wen-Jun.)

Indexed by:

EI Scopus PKU CSCD

Abstract:

BN thin film was prepared by RF sputtering on n-Si (100) wafer. We used ion implantation technique to introduce Be+ into BN thin film, and the film showed p-type semiconductor properties. We firstly used Van der Pauw method to measure the Hall Effect of the doped film at room temperature, and the film showed p-type conductivity which resistivity was around 10-3Ω·cm, mobility was 14-28 cm2/V·S, carrier concentration was 1019-1020 cm-3 and Hall coefficient was about 10-1 cm3/C. The p-BN/n-Si heterojunction showed obvious rectifier characteristics.

Keyword:

Hall effect Ion implantation Heterojunctions Thin films Sputtering Electric conductivity Carrier concentration Cubic boron nitride Silicon wafers

Author Community:

  • [ 1 ] [He, Bin]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Chen, Guang-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 3 ] [Gao, Zhi-Hua]School of Materials Science and Engineering, Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Deng, Jin-Xiang]School of Applied Mathematics and Physics, Beijing University of Technology, Beijing 100022, China
  • [ 5 ] [Zhang, Wen-Jun]Department of Physics and Materials Science, City University of Hong Kong, Hong Kong, Hong Kong

Reprint Author's Address:

Show more details

Related Keywords:

Related Article:

Source :

Journal of Synthetic Crystals

ISSN: 1000-985X

Year: 2008

Issue: 2

Volume: 37

Page: 504-506

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 13

Online/Total:473/10580220
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.