The　elastic　modulus　of　material　in　micro-regions　could　be　achieved　by　the　non-destructive　testing　method　at　the　nanoscale　based　on　ultrasonic　atomic　force　microscopy　techniques.　The　vibration　behavior　of　the　micro-beam　excited　by　ultrasonic　wave　was　calculated　numerically　by　the　finite　element　method.　The　results　calculated　were　compared　with　the　resonance　spectra　gotten　by　the　ultrasonic　atomic　force　microscopy　method　experimentally.　The　simulation　results　coincide　with　the　experimental　results,　by　which　the　reliability　of　the　simulation　method　was　verified.　The　effects　of　the　position　of　the　sense　tip　on　the　resonant　frequency　were　also　described.