Influence of evaporation rate on optical constants of ITO deposited by e-beam evaporation - Details

Author：

Li, Tian-Lin (Li, Tian-Lin.) | Zhu, Yan-Xu (Zhu, Yan-Xu.) | Xu, Chen (Xu, Chen.) (Scholars：徐晨) | Gao, Guo (Gao, Guo.) | Shen, Guang-Di (Shen, Guang-Di.)

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EI Scopus PKU CSCD

Abstract：

Due　to　its　complicated　microstructure　and　absorption　mechanism,　it＇s　difficult　to　measuring　optical　constants　of　ITO.　In　this　paper,　variable　angle　of　incidence　spectroscopic　ellipsometry　(VASE)　was　employed　to　measure　the　ellipsometric　parameters　of　ITO.　A　simple　but　appropriate　model　was　established　to　fit　experiment　data　of　ITO　in　visible　spectrum.　Based　on　the　fitting　result　of　VASE,　the　influence　of　evaporation　rate　on　optical　constants　of　ITO　deposited　by　e-beam　evaporation　was　investigated.　The　result　showed　refractive　index　and　extinction　coefficient　increased　with　evaporation　rate　of　ITO.　On　the　basis　of　Hall　effect,　carrier　concentrations　of　ITO　under　different　evaporation　rate　were　measured.　This　result　showed　it　was　reasonable　that　optical　constants　of　ITO　increase　with　evaporation　rate.

Keyword：

Ellipsometry Rate constants Refractive index Spectroscopic ellipsometry Evaporation Optical constants

Author Community：

[ 1 ] [Li, Tian-Lin]Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China
[ 2 ] [Zhu, Yan-Xu]Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Xu, Chen]Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Gao, Guo]Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China
[ 5 ] [Shen, Guang-Di]Beijing Optoelectronic Technology Laboratory, Institute of Information, Beijing University of Technology, Beijing 100022, China

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Source ：

Journal of Functional Materials

ISSN： 1001-9731

Year： 2009

Issue： 1

Volume： 40

Page： 56-59

Cited Count：

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SCOPUS Cited Count：

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 2

Affiliated Colleges：

信息科学技术学院本学院/部未明确归属的数据

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