Fabrication and study of 2000 l/mm X-ray self-standing transmission gratings - Details

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EI PKU CSCD

Abstract：

Within　the　limit　of　fabricating　techniques,　2000　l/mm　self-standing　transmission　gratings　model　was　designed.　And　by　combining　the　techniques　of　electronic-beam　lithography　and　X-ray　lithography,　the　2000　l/mm　X-ray　self-standing　transmission　gratings　was　fabricated.　Firstly,　the　electronic-beam　lithography　and　micro-electroplating　technology　was　used　to　prepare　a　master　mask　of　gratings　on　polyimide　membrane　substrate.　Then　by　using　X-ray　lithography　and　micro-electroplating,　child　gratings　was　replicated　on　the　master　mask.　And　the　self-standing　graph　was　transferred　to　the　daughter　gratings　via　utraviolet　(U-V)　lithography　and　micro-electroplating.　Finally,　with　the　technology　of　etching　and　inductively　coupled　plasma　(ICP),　the　fabrication　of　X-ray　self-standing　transmission　gratings　was　fulfilled.　From　the　fabrication　results　of　the　gratings,　it　shows　that　bars　smoothness,　the　absent　ratio　and　the　profile　of　the　gratings　are　all　desired.

Keyword：

Etching Inductively coupled plasma Fabrication Electroplating Transmissions X rays Substrates X ray lithography

Author Community：

[ 1 ] [Li, Hailiang]Key Lab of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 2 ] [Li, Hailiang]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Wu, Jian]Institute of Laser Engineering, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Zhu, Xiaoli]Key Lab of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 5 ] [Xie, Changqing]Key Lab of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 6 ] [Liu, Ming]Key Lab of Nano-Fabrication and Novel Devices Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
[ 7 ] [Cao, Leifeng]Research Center of Laser Fusion, China Academy of Engineering Physics, Mianyang, Sichuan 621900, China