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Author:

Zhao, Linlin (Zhao, Linlin.) | Xu, Chen (Xu, Chen.) (Scholars:徐晨) | Yang, Daohong (Yang, Daohong.) | Huo, Wenxiao (Huo, Wenxiao.) | Zhao, Hui (Zhao, Hui.) | Shen, Guangdi (Shen, Guangdi.)

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Abstract:

A micromachining Golay-cell infrared detector using silicon micromachining technology includes a movable sensitive diaphragm. The IR detector has a tiny gas chamber formed by bond with diaphragm-die and hole-die. The movable sensitive diaphragm deflection under pressure resulting from gas expansion is available with planar capacitor between silicon diaphragm electrode and metal electrode. A novel Si/Ti/Au/Au/Ti/Si bonding method based on Au/Si eutectic bonding was presented for forming a gas chamber. The detector was fabricated and responded basically using this bonding method. This method can process selective area bonding and the bond intensity reaches to bulk silicon intensity experimentally.

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Source :

China Mechanical Engineering

ISSN: 1004-132X

Year: 2005

Issue: SUPPL.

Volume: 16

Page: 419-421

Cited Count:

WoS CC Cited Count:

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ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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