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Abstract:
A micromachining Golay-cell infrared detector using silicon micromachining technology includes a movable sensitive diaphragm. The IR detector has a tiny gas chamber formed by bond with diaphragm-die and hole-die. The movable sensitive diaphragm deflection under pressure resulting from gas expansion is available with planar capacitor between silicon diaphragm electrode and metal electrode. A novel Si/Ti/Au/Au/Ti/Si bonding method based on Au/Si eutectic bonding was presented for forming a gas chamber. The detector was fabricated and responded basically using this bonding method. This method can process selective area bonding and the bond intensity reaches to bulk silicon intensity experimentally.
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Source :
China Mechanical Engineering
ISSN: 1004-132X
Year: 2005
Issue: SUPPL.
Volume: 16
Page: 419-421
Cited Count:
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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