Primary resonance analysis and optimal design of microbeam resonator with variable cross section under electrostatic actuator - Details

Author：

Liu, Cheng (Liu, Cheng.) | Hao, Shuying (Hao, Shuying.) | Zhang, Kunpeng (Zhang, Kunpeng.) | Feng, Jingjing (Feng, Jingjing.) | Zhang, Wei (Zhang, Wei.)

Indexed by：

EI Scopus

Abstract：

In　this　paper,　the　doubly　clamped　microbeam-based　resonator　which　actuated　by　two　electrodes　is　investigated.　A　section　parameter　is　proposed　to　describe　the　microbeam　variables　in　the　upper　and　under　section.　The　differential　equation　is　derived　by　considering　the　influence　of　neutral　surface　tension　and　the　nonlinearity　of　electrostatic　force.　The　Galerkin　and　Newton　Cotes　methods　are　used　to　obtain　reduced-order　model.　The　nonlinear　vibration　behaviors　of　system　at　equilibrium　point　are　analysed.　First,　the　frequency　response　is　obtained　by　the　method　of　multi-scale　(MMS).　The　relationship　between　section　parameter　and　mechanical　property　of　the　microresonator　is　studied.　Then,　the　system　is　optimized　by　considering　the　relationship　between　section　parameter　and　the　actual　physical　parameters.　Finally,　the　finite　element　method　through　COM-SOL　software　is　used　to　verify　the　theoretical　results,　and　the　two　results　are　very　close　to　each　other　in　the　stable　region.　The　research　results　provide　a　good　reference　for　the　design　of　microresonator.　©　25th　International　Congress　on　Sound　and　Vibration　2018,　ICSV　2018:　Hiroshima　Calling.　All　rights　reserved.

Keyword：

Electrostatic actuators Sols Differential equations Resonators Vibration analysis Electrostatics Frequency response

Author Community：

[ 1 ] [Liu, Cheng]Tianjin University of Technology, School of Mechanical Engineering, Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin, China
[ 2 ] [Liu, Cheng]Tianjin University of Technology, National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin, China
[ 3 ] [Hao, Shuying]Tianjin University of Technology, School of Mechanical Engineering, Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin, China
[ 4 ] [Hao, Shuying]Tianjin University of Technology, National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin, China
[ 5 ] [Zhang, Kunpeng]Tianjin University of Technology, School of Mechanical Engineering, Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin, China
[ 6 ] [Zhang, Kunpeng]Tianjin University of Technology, National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin, China
[ 7 ] [Feng, Jingjing]Tianjin University of Technology, School of Mechanical Engineering, Tianjin Key Laboratory for Advanced Mechatronic System Design and Intelligent Control, Tianjin, China
[ 8 ] [Feng, Jingjing]Tianjin University of Technology, National Demonstration Center for Experimental Mechanical and Electrical Engineering Education, Tianjin, China
[ 9 ] [Zhang, Wei]Beijing University of Technology, College of Mechanical Engineering, Beijing Key Laboratory on Nonlinear Vibrations and Strength of Mechanical Structures, Beijing, China

Reprint Author's Address：

[feng, jingjing]tianjin university of technology, national demonstration center for experimental mechanical and electrical engineering education, tianjin, china;;[feng, jingjing]tianjin university of technology, school of mechanical engineering, tianjin key laboratory for advanced mechatronic system design and intelligent control, tianjin, china

Email：

jjfeng@tju.edu.cn

Show more details

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Source ：

Year： 2018

Volume： 5

Page： 2978-2985

Language： English

Cited Count：

WoS CC Cited Count： 0

SCOPUS Cited Count：

ESI Highly Cited Papers on the List： 0 Unfold All

WanFang Cited Count：

Chinese Cited Count：

30 Days PV： 6

Affiliated Colleges：

材料科学与工程学院本学院/部未明确归属的数据

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