Wafer-scale graphene synthesis, transfer and FETs - Details

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EI Scopus

Abstract：

Growth　and　characterization　of　graphene　grown　using　copper　foils　as　well　as　copper　films　on　silicon　dioxide　on　silicon　substrates　were　performed.　Kinetics　of　growth　and　effective　activation　energy　for　the　graphene　synthesis　will　be　discussed　for　the　surface　catalytic　synthesis　of　graphene.　Conditions　for　large-scale　synthesis　of　monolayer　graphene　will　be　addressed　in　this　talk.　Wafer-scale　graphene　transfer　and　electrical　results　will　be　presented.　Based　on　our　preliminary　results　from　capped　100mm　wafer　scale　graphene　transistors,　we　expect　a　mobility　of　4-6　k　cm2/Vs　with　symmetry　hole/electron　transport.　Key　considerations　and　challenges　for　scaling　are　discussed　and　results　for　graphene　growth　on　the　300mm　wafer　scale　will　be　discussed.　©　2013　IEEE.

Keyword：

Nanotechnology Activation energy Silicon wafers Graphene Graphene transistors Copper compounds Hole mobility Silica Growth kinetics

Author Community：

[ 1 ] [Teo, K.B.K.]Aixtron Ltd, Nanoinstruments, Swavesey, Cambridge CB24 4FQ, United Kingdom
[ 2 ] [You, B.]Aixtron Ltd, Nanoinstruments, Swavesey, Cambridge CB24 4FQ, United Kingdom
[ 3 ] [Rupesinghe, N.L.]Aixtron Ltd, Nanoinstruments, Swavesey, Cambridge CB24 4FQ, United Kingdom
[ 4 ] [Newham, A.]Aixtron Ltd, Nanoinstruments, Swavesey, Cambridge CB24 4FQ, United Kingdom
[ 5 ] [Greenwood, P.]Aixtron Ltd, Nanoinstruments, Swavesey, Cambridge CB24 4FQ, United Kingdom
[ 6 ] [Buttress, S.]Aixtron Ltd, Nanoinstruments, Swavesey, Cambridge CB24 4FQ, United Kingdom
[ 7 ] [Cole, M.T.]Aixtron Ltd, Nanoinstruments, Swavesey, Cambridge CB24 4FQ, United Kingdom
[ 8 ] [Tao, L.]Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX 78712, United States
[ 9 ] [Lee, J.]Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX 78712, United States
[ 10 ] [Akinwande, D.]Department of Electrical and Computer Engineering, University of Texas at Austin, Austin, TX 78712, United States
[ 11 ] [Celebi, K.]Department of Mechanical and Process Engineering, ETH Zurich, Zurich CH-8092, Switzerland
[ 12 ] [Park, H.G.]Department of Mechanical and Process Engineering, ETH Zurich, Zurich CH-8092, Switzerland
[ 13 ] [Sun, J.]Optoelectronics Lab, Beijing University of Technology, Beijing 100124, China
[ 14 ] [Sun, J.]MC2, Chalmers University of Technology, 41296, Sweden