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Author:

Fan, Xing (Fan, Xing.) | Sun, Jie (Sun, Jie.) | Guo, Weiling (Guo, Weiling.) (Scholars:郭伟玲) | Ke, Xiaoxing (Ke, Xiaoxing.) | Yan, Chunli (Yan, Chunli.) | Li, Xuejian (Li, Xuejian.) | Dong, Yibo (Dong, Yibo.) | Xiong, Fangzhu (Xiong, Fangzhu.) | Fu, Yafei (Fu, Yafei.) | Wang, Le (Wang, Le.) | Deng, Jun (Deng, Jun.) | Xu, Chen (Xu, Chen.) (Scholars:徐晨)

Indexed by:

EI Scopus SCIE

Abstract:

Large area graphene is usually grown by chemical vapor deposition on Cu or Ni catalysts at similar to 1000 degrees C. For most materials, high temperature leads to high quality. However, graphene growth at even higher temperatures is rarely reported. Therefore, here we systematically investigate the graphene deposition on refractory metals i.e. metals with extremely high melting points. The growth parameters and material characterizations are given in detail. On Ta which readily forms carbides during the carbon deposition, the growth mode is monolayer due to the chemical absorption of excess carbon in the bulk metal. On Re, there is no carbide formed (except in extreme conditions), which greatly simplifies the scenario. Because of the relatively high carbon solubility in Re, the growth temperature has to be limited in order not to drift into the dominantly multilayer graphene regime caused by the carbon segregation. Graphene with reasonable quality has been achieved, although not as good as expected. For example, on Ta, the residual bonds between the graphene and substrate deteriorate the graphene crystalline quality. Despite the difficulties in refractory metal etching, the transfer technique of the graphene is also explored. This research contributes to the fundamental understanding of the graphene growth theory and technology on refractory metals.

Keyword:

Graphene Chemical vapor deposition Refractory metal High temperature growth

Author Community:

  • [ 1 ] [Fan, Xing]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 2 ] [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 3 ] [Li, Xuejian]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 4 ] [Dong, Yibo]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 5 ] [Xiong, Fangzhu]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 6 ] [Fu, Yafei]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 7 ] [Wang, Le]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 8 ] [Deng, Jun]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Xu, Chen]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display T, Fuzhou 350116, Fujian, Peoples R China
  • [ 11 ] [Ke, Xiaoxing]Beijing Univ Technol, Inst Microstruct & Properties Adv Mat, Beijing 100124, Peoples R China
  • [ 12 ] [Yan, Chunli]Lib Fuzhou Univ, Dept Informat & Automat, Fuzhou 350116, Fujian, Peoples R China

Reprint Author's Address:

  • 孙捷 郭伟玲

    [Guo, Weiling]Beijing Univ Technol, Coll Microelect, Key Lab Optoelect Technol, Beijing 100124, Peoples R China;;[Sun, Jie]Fuzhou Univ, Coll Phys & Informat Engn, Natl & Local United Engn Lab Flat Panel Display T, Fuzhou 350116, Fujian, Peoples R China

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Source :

SYNTHETIC METALS

ISSN: 0379-6779

Year: 2019

Volume: 247

Page: 233-239

4 . 4 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:123

JCR Journal Grade:1

Cited Count:

WoS CC Cited Count: 6

SCOPUS Cited Count: 7

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 4

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