Indexed by:
Abstract:
We have investigated the 1:1 internal mode coupling strength in a GaAs doubly-clamped MEMS beam resonator by thermally tuning the frequencies of two neighbored resonant modes. The anti-crossing of the resonant frequencies indicates that the two modes couple with each other, and the mode coupling strength was estimated by the splitting of the anti-crossed frequencies of the two modes. When the oscillation amplitudes were tuned from the weakly-driven linear regime to the strongly-driven nonlinear regime, we observed slightly increased frequency splitting, indicating that the nonlinear oscillation only makes a very small contribution to the mode coupling strength. © 2020 The Japan Society of Applied Physics.
Keyword:
Reprint Author's Address:
Email:
Source :
Applied Physics Express
ISSN: 1882-0778
Year: 2021
Issue: 1
Volume: 14
2 . 3 0 0
JCR@2022
ESI Discipline: PHYSICS;
ESI HC Threshold:72
JCR Journal Grade:2
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count: 8
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 0