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Author:

Zhang, Ya (Zhang, Ya.) (Scholars:张永安) | Kondo, Ryoka (Kondo, Ryoka.) | Qiu, Boqi (Qiu, Boqi.) | Liu, Xin (Liu, Xin.) | Hirakawa, Kazuhiko (Hirakawa, Kazuhiko.)

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EI Scopus SCIE

Abstract:

We report on a giant enhancement in the thermal responsivity of doubly clamped GaAs microelectromechanical-system- (MEMS) beam resonators by using the internal-mode-coupling effect. This is achieved by coupling the fundamental bending mode with the fundamental torsional mode of the MEMS-beam resonators through the cubic Duffing nonlinearity. In the mode-coupling regime, we find that when the input heat to the MEMS resonators is modulated at a particular frequency, the resonance-frequency shift caused by heating can be enhanced by almost 2 orders of magnitude. The observed effect is promising for realization of high-sensitivity thermal sensing by use of MEMS resonators, such as ultrasensitive terahertz detection at room temperature. © 2020 American Physical Society.

Keyword:

Gallium arsenide MEMS Resonators III-V semiconductors Crystal resonators Microelectromechanical devices

Author Community:

  • [ 1 ] [Zhang, Ya]Institute of Engineering, Tokyo University of Agriculture and Technology, Koganei-shi, Tokyo; 184-8588, Japan
  • [ 2 ] [Kondo, Ryoka]Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan
  • [ 3 ] [Qiu, Boqi]Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan
  • [ 4 ] [Liu, Xin]Beijing-Dublin International College, Institute of Theoretical Physics, Beijing University of Technology, 100 Pingleyuan, Beijing; 100124, China
  • [ 5 ] [Hirakawa, Kazuhiko]Institute of Industrial Science, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan
  • [ 6 ] [Hirakawa, Kazuhiko]Institute for Nano Quantum Information Electronics, University of Tokyo, 4-6-1 Komaba, Meguro-ku, Tokyo; 153-8505, Japan

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Source :

Physical Review Applied

Year: 2020

Issue: 1

Volume: 14

4 . 6 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:100

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 22

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

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