Indexed by:
Abstract:
We report on a giant enhancement in the thermal responsivity of doubly clamped GaAs microelectromechanical-system- (MEMS) beam resonators by using the internal-mode-coupling effect. This is achieved by coupling the fundamental bending mode with the fundamental torsional mode of the MEMS-beam resonators through the cubic Duffing nonlinearity. In the mode-coupling regime, we find that when the input heat to the MEMS resonators is modulated at a particular frequency, the resonance-frequency shift caused by heating can be enhanced by almost 2 orders of magnitude. The observed effect is promising for realization of high-sensitivity thermal sensing by use of MEMS resonators, such as ultrasensitive terahertz detection at room temperature. © 2020 American Physical Society.
Keyword:
Reprint Author's Address:
Email:
Source :
Physical Review Applied
Year: 2020
Issue: 1
Volume: 14
4 . 6 0 0
JCR@2022
ESI Discipline: PHYSICS;
ESI HC Threshold:100
Cited Count:
SCOPUS Cited Count: 22
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 3