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Author:

Zhang, Ya (Zhang, Ya.) | Yoshioka, Yuri (Yoshioka, Yuri.) | Morohashi, Isao (Morohashi, Isao.) | Liu, Xin (Liu, Xin.)

Indexed by:

EI Scopus SCIE

Abstract:

We have investigated the 1:1 internal mode coupling strength in a GaAs doubly-clamped MEMS beam resonator by thermally tuning the frequencies of two neighbored resonant modes. The anti-crossing of the resonant frequencies indicates that the two modes couple with each other, and the mode coupling strength was estimated by the splitting of the anti-crossed frequencies of the two modes. When the oscillation amplitudes were tuned from the weakly-driven linear regime to the strongly-driven nonlinear regime, we observed slightly increased frequency splitting, indicating that the nonlinear oscillation only makes a very small contribution to the mode coupling strength.

Keyword:

mode coupling strength terahertz bolometer internal mode coupling MEMS sensor nonlinear oscillation MEMS resonator

Author Community:

  • [ 1 ] [Zhang, Ya]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan
  • [ 2 ] [Yoshioka, Yuri]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan
  • [ 3 ] [Morohashi, Isao]Natl Inst Informat & Commun Technol, 4-2-1 Nukui Kitamachi, Koganei, Tokyo 1848795, Japan
  • [ 4 ] [Liu, Xin]Beijing Univ Technol, Beijing Dublin Int Coll, 100 Pingleyuan, Beijing 100124, Peoples R China
  • [ 5 ] [Liu, Xin]Beijing Univ Technol, Inst Theoret Phys, 100 Pingleyuan, Beijing 100124, Peoples R China

Reprint Author's Address:

  • [Zhang, Ya]Tokyo Univ Agr & Technol, Inst Engn, Koganei, Tokyo 1848588, Japan

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Source :

APPLIED PHYSICS EXPRESS

ISSN: 1882-0778

Year: 2021

Issue: 1

Volume: 14

2 . 3 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:72

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 1

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 0

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