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Author:

Zhao, J. (Zhao, J..) | Qin, F. (Qin, F..) | Yu, D. (Yu, D..)

Indexed by:

EI Scopus SCIE

Abstract:

The 2.5D package is intended to deliver increased IO density and high frequency electrical performance while meeting cost requirements. It achieves chip heterogeneous integration capabilities through the interposer. However, some warpage will always occur during the molding process because of the different coefficients of thermal expansion between the chip and the molding compound. One of the challenges is predicting and controlling wafer warpage. This paper focuses on wafer warpage prediction and optimization of the through glass via (TGV) interposer. The plate and shell bending theory and composite material equivalence method are introduced in the discussion of the wafer warpage problem. A set of wafer-level warpage theoretical calculation model is proposed, and the calculation accuracy of the warpage theoretical model is verified by finite element simulation and experiment. Meanwhile, its actual engineering application is given to provide direction for the design of wafer level packaging products for TGV interposer. IEEE

Keyword:

Glass Bending Plate and shell bending theory Through glass via (TGV) Packaging Manufacturing Glass interposer Residual stresses Warpage prediction Finite element modelling (FEM) Semiconductor device modeling Substrates

Author Community:

  • [ 1 ] [Zhao J.]School of Mathematical Statistics and Mechanics, Beijing University of Technology, Beijing, China
  • [ 2 ] [Qin F.]School of Mathematical Statistics and Mechanics, Beijing University of Technology, Beijing, China
  • [ 3 ] [Yu D.]School of Electronic Science and Engineering, Xiamen University, Xiamen, China

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Source :

IEEE Transactions on Components, Packaging and Manufacturing Technology

ISSN: 2156-3950

Year: 2024

Issue: 8

Volume: 14

Page: 1-1

2 . 2 0 0

JCR@2022

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 12

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