Characteristic of micro-opto-electro-mechanical system-cantilever of tunable micro-cavity light emitting diodes - Details

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Abstract：

An　GaAs-based　micro-opto-electro-mechanical　system　(MOEMS)　cantilever　tunable　light　emitting　diode　was　presented.　It　is　fabricated　by　standard　surface　micromachining　technology.　The　relation　of　cantilever　loading　and　displacement　was　measured,　and　the　tunable　spectrum　of　this　cantilever　tunable　light　emitting　diode　was　also　measured.　When　the　current　is　40　mA　and　applied　voltage　is　from　4　V　to　22　V,　the　wavelength　is　tuned　from　974.5　nm　to　956.9　nm　and　a　wide　tuning　range　of　17.6　nm　was　achieved　under　the　room　temperature.　The　optical　and　mechanical　characters　of　the　cantilever　with　distributed　Bragg　reflector　(DBR)　multiple　layers　in　detail　were　studied　by　the　finite　element　method.　Further　numerical　simulations　with　MOEMS-cantilever　show　when　the　length　of　cantilever　is　400μm,　the　max-displacement　of　center　of　cantilever　is　411　nm,　and　max-voltage　is　24　V.

Keyword：

Optical devices Semiconducting gallium arsenide Distributed Bragg reflectors Surface micromachining Finite element method Computer simulation Light emitting diodes

Author Community：

[ 1 ] [Guan, Baolu]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 2 ] [Guo, Xia]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 3 ] [Gu, Xiaoling]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 4 ] [Yang, Hao]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 5 ] [Deng, Jun]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 6 ] [Gao, Guo]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China
[ 7 ] [Shen, Guangdi]Beijing Optoelectronic Technology Laboratory, Institute of Electronic Information and Control Engineering, Beijing University of Technology, Beijing 100022, China