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Abstract:
GaN thin films grown on sapphire substrates are successfully bonded and transferred onto Si receptor substrates using fusion bonding and laser lift-off (LLO) technique. The GaN/Al2O3 structures are joined on Si substrates by pressure bonding Al/Ti/Au coated GaN surfaces onto Ti/Au/In coated Si receptor substrates at the temperature of 200°C. KrF excimer laser with 450 mJ/cm2 energy density, 248 nm wavelength and 25ns pulse width is used to direct through the transparent sapphire substrates to separate GaN films from sapphire substrates. Scanning electron microscope (SEM) images show that compact GaN/Al/Ti/Au/In/Au/Ti/Si structures are formed during bonding process. Atomic force microscope (AFM) and photoluminescence (PL) measurements show that the qualities of GaN films on Si substrates degrade little after substrate transfer.
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Source :
Journal of Functional Materials
ISSN: 1001-9731
Year: 2007
Issue: 1
Volume: 38
Page: 88-90
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
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