Highly　ordered　TiO2　nanotube　arrays　were　fabricated　on　a　conducting　glass　substrate　in　NH4HF2/glycol　electrolyte　via　anodization　of　titanium　film　which　was　deposited　by　direct　current　magnetron　sputtering　(DCMS)　at　different　temperatures.　The　results　showed　that　Ti　films　with　good　homogeneity　and　high　denseness　could　be　formed　under　the　conditions　Ar　pressure　0.35　Pa,　direct　current　3.5　A,　and　2　h　at　300　degrees　C.　Characterization　of　the　TiO2　nanotube　arrays　was　investigated　comparatively,　by　altering　anodization　time.　The　surface　morphology　of　the　samples　changed　as　the　anodization　time　was　prolonged　from　10　to　150　min　at　30　V.　The　TiO2　thin　film　was　amorphous　and　could　be　transformed　into　anatase　by　annealing　at　450　degrees　C.　On　the　basis　of　UV-visible　transmission　spectra　the　bandgap　of　the　thin　film　was　calculated　to　be　3.12　eV,　and　its　tail　extended　to　2.6　eV.