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Author:

Sun, Weigao (Sun, Weigao.) | Ji, Lingfei (Ji, Lingfei.) (Scholars:季凌飞) | Lin, Zhenyuan (Lin, Zhenyuan.) | Zheng, Jincan (Zheng, Jincan.) | Wang, Zhiyong (Wang, Zhiyong.) | Zhang, Litian (Zhang, Litian.) | Yan, Tianyang (Yan, Tianyang.)

Indexed by:

EI Scopus SCIE

Abstract:

A one-step laser lift-off (LLO) for patterned gallium nitride (GaN) film and GaN-based light-emitting diode (LED) device is achieved using 355 nm picosecond laser irradiation in this research. The laser fluence required for separation is 0.09-0.13 J cm(-2), which is much lower than that for the currently reported LLO methods. The separated GaN film is intact with only 0.04 GPa of residual stress. The ultra-smooth separated surface with root mean square roughness of only 5.2 nm is attributed to the interconnection of microcrack-free flat cavities formed by the combination of high photon energy-induced intrinsic absorption and subsequent plasma generation. The flat cavity with a depth-to-width ratio of 1:4000 limits the delamination region to a few nanometers at the GaN/sapphire interface. GaN-based LED is transferred with perfect electroluminescence (EL) by the strategy. The stable EL spectral peak positions and intensity independent of the bending state prove that the presented low-energy ultrafast LLO technique ensured the flexibility of the separated LED device without affecting the performance. This research provides a promising strategy to achieve the LLO of GaN devices with low energy consumption, high controllability, and high efficiency, which is significant for the industrial fabrication of flexible GaN-based electronics.

Keyword:

ultrafast laser lift-off flexible electronics plasma GaN devices photochemical decomposition

Author Community:

  • [ 1 ] [Sun, Weigao]Beijing Univ Technol, Fac Mat & Mfg, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 2 ] [Ji, Lingfei]Beijing Univ Technol, Fac Mat & Mfg, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 3 ] [Lin, Zhenyuan]Beijing Univ Technol, Fac Mat & Mfg, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 4 ] [Zheng, Jincan]Beijing Univ Technol, Fac Mat & Mfg, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 5 ] [Wang, Zhiyong]Beijing Univ Technol, Fac Mat & Mfg, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 6 ] [Zhang, Litian]Beijing Univ Technol, Fac Mat & Mfg, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 7 ] [Yan, Tianyang]Beijing Univ Technol, Fac Mat & Mfg, Inst Laser Engn, Beijing 100124, Peoples R China
  • [ 8 ] [Sun, Weigao]Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 9 ] [Ji, Lingfei]Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 10 ] [Lin, Zhenyuan]Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 11 ] [Zheng, Jincan]Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 12 ] [Wang, Zhiyong]Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 13 ] [Zhang, Litian]Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China
  • [ 14 ] [Yan, Tianyang]Minist Educ, Key Lab Trans Scale Laser Mfg Technol, Beijing 100124, Peoples R China

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Source :

ADVANCED FUNCTIONAL MATERIALS

ISSN: 1616-301X

Year: 2022

Issue: 8

Volume: 32

1 9 . 0

JCR@2022

1 9 . 0 0 0

JCR@2022

ESI Discipline: MATERIALS SCIENCE;

ESI HC Threshold:66

JCR Journal Grade:1

CAS Journal Grade:1

Cited Count:

WoS CC Cited Count: 25

SCOPUS Cited Count: 31

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 9

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