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Abstract:
A one-step laser lift-off (LLO) for patterned gallium nitride (GaN) film and GaN-based light-emitting diode (LED) device is achieved using 355 nm picosecond laser irradiation in this research. The laser fluence required for separation is 0.09-0.13 J cm(-2), which is much lower than that for the currently reported LLO methods. The separated GaN film is intact with only 0.04 GPa of residual stress. The ultra-smooth separated surface with root mean square roughness of only 5.2 nm is attributed to the interconnection of microcrack-free flat cavities formed by the combination of high photon energy-induced intrinsic absorption and subsequent plasma generation. The flat cavity with a depth-to-width ratio of 1:4000 limits the delamination region to a few nanometers at the GaN/sapphire interface. GaN-based LED is transferred with perfect electroluminescence (EL) by the strategy. The stable EL spectral peak positions and intensity independent of the bending state prove that the presented low-energy ultrafast LLO technique ensured the flexibility of the separated LED device without affecting the performance. This research provides a promising strategy to achieve the LLO of GaN devices with low energy consumption, high controllability, and high efficiency, which is significant for the industrial fabrication of flexible GaN-based electronics.
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ADVANCED FUNCTIONAL MATERIALS
ISSN: 1616-301X
Year: 2022
Issue: 8
Volume: 32
1 9 . 0
JCR@2022
1 9 . 0 0 0
JCR@2022
ESI Discipline: MATERIALS SCIENCE;
ESI HC Threshold:66
JCR Journal Grade:1
CAS Journal Grade:1
Cited Count:
WoS CC Cited Count: 25
SCOPUS Cited Count: 31
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 9
Affiliated Colleges: