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Author:

Zhu, Hui (Zhu, Hui.) | Fang, Zhixuan (Fang, Zhixuan.) | Xie, Na (Xie, Na.) | Huang, Zeng (Huang, Zeng.) | Liu, Zheng (Liu, Zheng.) | Li, Dong (Li, Dong.) | Feng, Shiwei (Feng, Shiwei.) | Guo, Chunsheng (Guo, Chunsheng.) | Zhang, Yamin (Zhang, Yamin.) | Zhou, Lixing (Zhou, Lixing.) | Liu, Bo (Liu, Bo.)

Indexed by:

EI Scopus SCIE

Abstract:

The change of electrical properties of flexible low-temperature polysilicon (LTPS) thin-film transistors (TFTs) under biaxial bending strains was studied. Biaxial strains were applied using a ring-on-ring bending test rig. The magnitude of the strain was determined by theoretical calculations and finite-element simulations. With an increase in strain, the transfer curve shifted to a negative bias. At a biaxial strain level of 12%, the threshold voltage decreased by 27%, the field-effect mobility decreased by 13%, and the subthreshold slope increased by 25%. It had a more significant effect on the property changes than the uniaxial strain; this difference may be attributed to additional trap states generated by the biaxial strain. The analysis showed that the trap density increased when the strain level increased. The contributions of the increases in the grain-boundary trap state density and the interface trap state density to the degradation in the electrical properties were derived to be 10% and 90%, respectively. After removal of the biaxial bending strains, the electrical performance showed recovery behavior, but the performance could not return fully to its original state.

Keyword:

Stress Biaxial bending strains Tensile strain Uniaxial strain Bending Thin film transistors electrical properties Threshold voltage flexible LTPS TFTs trap state density recovery Strain

Author Community:

  • [ 1 ] [Zhu, Hui]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 2 ] [Fang, Zhixuan]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 3 ] [Xie, Na]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 4 ] [Huang, Zeng]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 5 ] [Feng, Shiwei]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 6 ] [Guo, Chunsheng]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 7 ] [Zhang, Yamin]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 8 ] [Zhou, Lixing]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 9 ] [Liu, Bo]Beijing Univ Technol, Fac Informat Technol, Sch Microelect, Beijing 100124, Peoples R China
  • [ 10 ] [Liu, Zheng]BOE Technol Grp Co Ltd, Beijing 100016, Peoples R China
  • [ 11 ] [Li, Dong]BOE Technol Grp Co Ltd, Beijing 100016, Peoples R China

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Source :

IEEE TRANSACTIONS ON ELECTRON DEVICES

ISSN: 0018-9383

Year: 2022

Issue: 9

Volume: 69

Page: 4924-4929

3 . 1

JCR@2022

3 . 1 0 0

JCR@2022

ESI Discipline: ENGINEERING;

ESI HC Threshold:49

JCR Journal Grade:2

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 2

SCOPUS Cited Count: 3

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 6

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