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Author:

Zhu, Hui (Zhu, Hui.) | Xie, Na (Xie, Na.) | Wang, Si (Wang, Si.) | Huang, Zeng (Huang, Zeng.) | Fang, Zhixuan (Fang, Zhixuan.) | Liu, Zheng (Liu, Zheng.) | Li, Dong (Li, Dong.) | Feng, Shiwei (Feng, Shiwei.) | Guo, Chunsheng (Guo, Chunsheng.) | Zhang, Yamin (Zhang, Yamin.) | Zhou, Lixing (Zhou, Lixing.) | Liu, Bo (Liu, Bo.)

Indexed by:

EI Scopus SCIE

Abstract:

The trap characteristics of low-temperature polysilicon thin film transistors (TFTs) are studied using a current transient method that is based on the trapping and detrapping of charge carriers from the trap sites in the device. Analysis of the measured current transient curve allowed three types of detrapping behavior to be identified, each of which displayed a different time constant, activation energy, and spatial position. This current transient method can be integrated into the negative bias temperature instability stress test used for the reliability study. The peak amplitudes of the traps increase because of the stress applied in the test, thus demonstrating that the degradation mechanism of the TFTs is closely related to changes in the traps in these devices. © 2021 IOP Publishing Ltd.

Keyword:

Degradation Negative temperature coefficient Activation energy Thermodynamic stability Thin film circuits Temperature Thin film transistors Polycrystalline materials Polysilicon Power quality Negative bias temperature instability Transients Activation analysis Thin films

Author Community:

  • [ 1 ] [Zhu, Hui]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 2 ] [Xie, Na]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 3 ] [Wang, Si]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 4 ] [Huang, Zeng]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 5 ] [Fang, Zhixuan]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 6 ] [Liu, Zheng]BOE Technology Group Co., Ltd, Beijing, China
  • [ 7 ] [Li, Dong]BOE Technology Group Co., Ltd, Beijing, China
  • [ 8 ] [Feng, Shiwei]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 9 ] [Guo, Chunsheng]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 10 ] [Zhang, Yamin]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 11 ] [Zhou, Lixing]Faculty of Information Technology, Beijing University of Technology, Beijing, China
  • [ 12 ] [Liu, Bo]Faculty of Information Technology, Beijing University of Technology, Beijing, China

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Source :

Semiconductor Science and Technology

ISSN: 0268-1242

Year: 2022

Issue: 1

Volume: 37

1 . 9

JCR@2022

1 . 9 0 0

JCR@2022

ESI Discipline: PHYSICS;

ESI HC Threshold:41

JCR Journal Grade:3

CAS Journal Grade:4

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count: 4

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 8

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