Silicon　carbide　(SiC)　fiber-reinforced　SiC-matrix　(SiC/SiC)　composite　has　a　wide　range　of　applications　in　the　aerospace　field.　However,　SiC/SiC　composite　is　typical　difficult-to-machine　materials　due　to　their　non-homogeneous　and　anisotropic　properties,　and　traditional　manufacturing　processes　cannot　meet　their　processing　requirements　in　aerospace　applications.　Femtosecond　laser　processing　technology　is　expected　to　become　the　preferred　choice　to　meet　this　demand,　due　to　their　ultrashort　irradiation　periods　and　ultrahigh　intensities.　In　this　study,　the　micro-grooving　processing　on　the　surface　of　SiC/SiC　composites　by　femtosecond　laser　is　investigated,　and　the　effects　of　laser　power,　scanning　speed　and　scanning　frequency　on　the　surface　morphology　of　SiC/SiC　composites　are　investigated.　The　results　show　that　there　are　recast　layers　in　the　ablation　zone　and　powdery　substances　in　the　processing　zone　during　the　laser　ablation　process　of　SiC/SiC　composite.　The　width　and　depth　of　the　micro-grooves　increase　with　the　increase　of　laser　power　and　scanning　times.　When　the　ablation　power　is　low　and　the　scanning　times　are　few,　the　grooves　are　non-uniformly　distributed　with　sawtooth　structure.　When　the　ablation　power　is　high　and　the　scanning　speed　is　low,　the　grooves　are　serrated.　Properly　increasing　the　scanning　speed　and　scanning　times　can　reduce　the　sawtooth　structure　and　improve　the　surface　quality　of　the　ablated　area.　This　proposed　method　can　achieve　good　morphology　of　SiC/SiC　and　is　expected　to　be　applied　to　industrial　processing　of　SiC/SiC.　©　2023　SPIE.