• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Xu, Bo (Xu, Bo.) | Zou, Miaomiao (Zou, Miaomiao.) | Men, Huijie (Men, Huijie.) | Dou, Fei (Dou, Fei.) | Ji, Xinyue (Ji, Xinyue.) | Jiaxingtang (Jiaxingtang.)

Indexed by:

EI

Abstract:

A new method for cutting silicon carbide wafers using a femtosecond laser has been proposed after studying the mechanism of action. The superiority of this method was established through a comparison with traditional molecular laser cutting on a test bench. The cutting speed and laser peak power were adjusted to determine the best parameters for cutting silicon carbide wafers using femtosecond pulse laser. Using this method can effectively reduce production costs, improve crystal cutting efficiency and quality, and has potential applications in hard and brittle crystal cutting. © 2023 IEEE.

Keyword:

Silicon wafers Cutting Electromagnetic pulse Silicon carbide Femtosecond lasers Crystals

Author Community:

  • [ 1 ] [Xu, Bo]Beijing Information Science & Technology University, Beijing, China
  • [ 2 ] [Zou, Miaomiao]Beijing University of Technology, Beijing, China
  • [ 3 ] [Men, Huijie]Beijing University of Technology, Beijing, China
  • [ 4 ] [Dou, Fei]Beijing University of Technology, Beijing, China
  • [ 5 ] [Ji, Xinyue]Beijing Information Science & Technology University, Beijing, China
  • [ 6 ] [Jiaxingtang]Beijing Information Science & Technology University, Beijing, China

Reprint Author's Address:

Email:

Show more details

Related Keywords:

Source :

Year: 2023

Page: 20-24

Language: English

Cited Count:

WoS CC Cited Count:

SCOPUS Cited Count: 2

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 9

Affiliated Colleges:

Online/Total:717/10649816
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.