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In this article, the synergistic effect of negative gate bias and radiation on SiC metal-oxide-semiconductor fieldeffect transistors (MOSFETs) is investigated. Under negative gate bias (-5, -10, and -15 V), a slight decrease in the threshold voltage (Vth) of non-irradiated SiC MOSFETs is observed. The variation of trapped-oxide charge (Not) and SiC/SiO2 interface trap charge ( Nit) can be obtained through the subthreshold swing and mid-gap voltage method. Although the Vth of non-irradiated SiC MOSFETs remains unchanged, significant increases in Nit and Not are observed due to the opposite effect of Not and Nit on Vth. This phenomenon is attributed to holes drifting to the interface and tunneling into the oxide layer under the negative gate bias. It is found through the Cg-Vgs characteristic curves that holes tunneling into the oxide layer are mostly from the channel region. For irradiated SiC MOSFETs, a large number of radiation-induced holes exist in the oxide layer above the channel region and JFET region, resulting in a decrease in Vth, which is mainly caused by an increase in Not.
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IEEE TRANSACTIONS ON NUCLEAR SCIENCE
ISSN: 0018-9499
Year: 2023
Issue: 8
Volume: 70
Page: 1990-1994
1 . 8 0 0
JCR@2022
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