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The crystallization mechanism in an amorphous Ge2Sb2Te5 (a-GST) thin film induced by a single pulsed laser was investigated in this paper. The finite element simulation and x-ray diffraction analysis showed that two kinds of crystallization mechanisms performed for the laser-induced phase transition of a-GST, that is, the solid-state phase transition took place at a lower laser fluence while the liquid-solid phase transition occurred at a relatively high laser fluence. Transmission electron microscopy observations showed that the microstructure in the liquid-solid phase transition was more uniform as compared to that in the solid-state phase transition because of poor atom diffusion. Crystallization characteristics at different laser fluences and film thickness were elucidated. It was found that at a lower laser fluence a thinner film had the better crystallinity owing to thermal convection, while at a higher laser fluence a thicker film showed the better crystallinity due to the release of latent heat in the liquid-solid phase transition. These findings enable a deep understanding of ultra-fast phase transition induced by laser irradiation. (C) 2018 Laser Institute of America.
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JOURNAL OF LASER APPLICATIONS
ISSN: 1042-346X
Year: 2018
Issue: 3
Volume: 30
2 . 1 0 0
JCR@2022
ESI Discipline: ENGINEERING;
ESI HC Threshold:156
JCR Journal Grade:3
Cited Count:
WoS CC Cited Count: 1
SCOPUS Cited Count: 1
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 3
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