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Author:

Pan, Shijie (Pan, Shijie.) | Feng, Shiwei (Feng, Shiwei.) (Scholars:冯士维) | Li, Xuan (Li, Xuan.) | Zheng, Xiang (Zheng, Xiang.) | Lu, Xiaozhuang (Lu, Xiaozhuang.) | Hu, Chaoxu (Hu, Chaoxu.) | Shao, Guojian (Shao, Guojian.) | Lin, Gang (Lin, Gang.)

Indexed by:

EI Scopus SCIE

Abstract:

The effects of high-energy (1 MeV) electron irradiation on the electrical and trapping properties of AlGaN/GaN high-electron-mobility transistors (HEMTs) are investigated systematically. When the irradiation fluence increases from 5 x 10(12)/cm(2) to 1 x 10(14)/cm(2), the drain-source current also increases and the threshold voltage shifts toward the negative direction. A Raman spectroscopy study shows that electron irradiation induces strain relaxation in the HEMT, which results in an improvement in the device's electrical characteristics. In particular, three traps in the device are identified using the voltage-transient method and the trapping effects in the HEMT are investigated after the final irradiation. When compared with the transient voltages during the pristine stage, the absolute amplitudes of the three traps in the device decrease after irradiation, which indicates a reduction in the density of the traps. Furthermore, it is proposed that the time constants of the three traps increase while the energy levels remain unchanged, which is ascribed to the strain relaxation and the structural ordering of the defects after electron irradiation. The observed changes in the trapping behaviors are consistent with the improvement in the electrical properties of the device and the shift in the Raman spectra.

Keyword:

high-electron-mobility transistors (HEMTs) Electron irradiation Raman spectra voltage-transientmethod gallium nitride (GaN)

Author Community:

  • [ 1 ] [Pan, Shijie]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 2 ] [Feng, Shiwei]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 3 ] [Li, Xuan]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 4 ] [Zheng, Xiang]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 5 ] [Lu, Xiaozhuang]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 6 ] [Hu, Chaoxu]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China
  • [ 7 ] [Shao, Guojian]Nanjing Elect Devices Inst, Nanjing 210016, Peoples R China
  • [ 8 ] [Lin, Gang]Nanjing Elect Devices Inst, Nanjing 210016, Peoples R China

Reprint Author's Address:

  • 冯士维

    [Feng, Shiwei]Beijing Univ Technol, Coll Microelect, Beijing 100124, Peoples R China

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Source :

IEEE TRANSACTIONS ON ELECTRON DEVICES

ISSN: 0018-9383

Year: 2021

Issue: 8

Volume: 68

Page: 3968-3973

3 . 1 0 0

JCR@2022

ESI Discipline: ENGINEERING;

ESI HC Threshold:87

JCR Journal Grade:2

Cited Count:

WoS CC Cited Count: 5

SCOPUS Cited Count: 6

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 3

Affiliated Colleges:

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