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Abstract:
In this paper, picosecond laser drilling of quartz glass is studied. The 532 nm picosecond laser induced ablation threshold of quartz glass is explored and the basic parameters of the picosecond laser processing of glass, including the laser power, repetition rate and processing time, are investigated. From the study, the ablation threshold of quartz glass at picosecond pulse width is concluded to be around 2.01 J/cm2. It is found that the diameter and depth of the holes drilled in quartz glass are proportional to the laser fluence and processing time, but the rate of increase levels off finally. Meanwhile the laser repetition rate also has an important influence on the machining quality. Picosecond laser crack-free processing of quartz glass is achieved by optimizing the laser parameters based on the ablation threshold and the processing rules obtained in our research.
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Chinese Journal of Lasers
ISSN: 0258-7025
Year: 2013
Issue: SUPPL
Volume: 40
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 9
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