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Abstract:
A new lifetime control technique-localized platinum lifetime control (LPLC) is introduced. Silicon samples are implanted with 550 keV protons at dosages from 1 × 1013 to 5 × 1014 cm-2. Subsequently, platinum diffusion in silicon is performed at 700 or 750°C for 15 or 30 min, respectively. Then the in-diffused platinum into damaged regions of the proton-implanted silicon is investigated by use of deep-level transient spectroscopy (DLTS). Finally, for all of the LPLC samples, the distribution of the in-diffused substitutional platinum agrees well with the damage distribution resulting from the low-dosage proton implantation. Also, the diodes show a very low leakage current even at elevated temperatures while keeping the major advantages of ion irradiation devices, including low turn-off loss and soft recovery.
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Chinese Journal of Semiconductors
ISSN: 0253-4177
Year: 2006
Issue: 2
Volume: 27
Page: 294-297
Cited Count:
WoS CC Cited Count: 0
SCOPUS Cited Count:
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 5
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