• Complex
  • Title
  • Keyword
  • Abstract
  • Scholars
  • Journal
  • ISSN
  • Conference
搜索

Author:

Jia, Yunpeng (Jia, Yunpeng.) | Zhang, Bin (Zhang, Bin.) | Sun, Yuechen (Sun, Yuechen.) | Kang, Baowei (Kang, Baowei.)

Indexed by:

EI Scopus PKU CSCD

Abstract:

A new lifetime control technique-localized platinum lifetime control (LPLC) is introduced. Silicon samples are implanted with 550 keV protons at dosages from 1 × 1013 to 5 × 1014 cm-2. Subsequently, platinum diffusion in silicon is performed at 700 or 750°C for 15 or 30 min, respectively. Then the in-diffused platinum into damaged regions of the proton-implanted silicon is investigated by use of deep-level transient spectroscopy (DLTS). Finally, for all of the LPLC samples, the distribution of the in-diffused substitutional platinum agrees well with the damage distribution resulting from the low-dosage proton implantation. Also, the diodes show a very low leakage current even at elevated temperatures while keeping the major advantages of ion irradiation devices, including low turn-off loss and soft recovery.

Keyword:

Ion implantation Semiconductor diodes Irradiation Doping (additives) Hydrogen Platinum Silicon Protons Leakage currents

Author Community:

  • [ 1 ] [Jia, Yunpeng]Beijing University of Technology, Beijing 100022, China
  • [ 2 ] [Zhang, Bin]Power Electronics Factory, Tsinghua University, Beijing 102201, China
  • [ 3 ] [Sun, Yuechen]Beijing University of Technology, Beijing 100022, China
  • [ 4 ] [Kang, Baowei]Beijing University of Technology, Beijing 100022, China

Reprint Author's Address:

Show more details

Related Keywords:

Related Article:

Source :

Chinese Journal of Semiconductors

ISSN: 0253-4177

Year: 2006

Issue: 2

Volume: 27

Page: 294-297

Cited Count:

WoS CC Cited Count: 0

SCOPUS Cited Count:

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 5

Affiliated Colleges:

Online/Total:300/10642258
Address:BJUT Library(100 Pingleyuan,Chaoyang District,Beijing 100124, China Post Code:100124) Contact Us:010-67392185
Copyright:BJUT Library Technical Support:Beijing Aegean Software Co., Ltd.