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Author:

Mao, Ming-Ming (Mao, Ming-Ming.) | Xu, Chen (Xu, Chen.) (Scholars:徐晨) | Xie, Yi-Yang (Xie, Yi-Yang.) | Kan, Qiang (Kan, Qiang.) | Xun, Meng (Xun, Meng.) | Xu, Kun (Xu, Kun.) | Wang, Jun (Wang, Jun.) | Ren, Hai-Qiang (Ren, Hai-Qiang.) | Chen, Hong-Da (Chen, Hong-Da.)

Indexed by:

EI Scopus SCIE

Abstract:

Two-dimensional in-phase coherently coupled vertical cavity surface emitting laser (VCSEL) array with high beam quality was fabricated by proton implantation. Indium-tin-oxide (ITO) current spreading layer was employed to improve the uniformity of the injection current. This makes a coherent array to operate in in-phase mode even in a relatively larger scale. The appropriate thickness of ITO current spreading layer was obtained by experiment (80 nm). The procedure of proton implantation defined array is considerably simple and low cost. A 3 x 3 in-phase coherently coupled array with 2.4 degrees (1.28 x D.L.) of lobe beamwidth was achieved. It sufficiently demonstrates the advantages of the high beam quality of the in-phase coherently coupled arrays. The output power of the array was up to 4.5 mw under pulse-wave condition.

Keyword:

in-phase high beam quality Coherently coupled VCSEL array

Author Community:

  • [ 1 ] [Mao, Ming-Ming]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 2 ] [Xu, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 3 ] [Xun, Meng]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 4 ] [Xu, Kun]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 5 ] [Wang, Jun]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 6 ] [Ren, Hai-Qiang]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China
  • [ 7 ] [Xie, Yi-Yang]Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
  • [ 8 ] [Kan, Qiang]Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China
  • [ 9 ] [Chen, Hong-Da]Chinese Acad Sci, Inst Semicond, State Key Lab Integrated Optoelect, Beijing 100083, Peoples R China

Reprint Author's Address:

  • 徐晨

    [Xu, Chen]Beijing Univ Technol, Key Lab Optoelect Technol, Minist Educ, Beijing 100124, Peoples R China

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Source :

IEEE PHOTONICS JOURNAL

ISSN: 1943-0655

Year: 2013

Issue: 6

Volume: 5

2 . 4 0 0

JCR@2022

ESI Discipline: PHYSICS;

JCR Journal Grade:1

CAS Journal Grade:2

Cited Count:

WoS CC Cited Count: 16

SCOPUS Cited Count: 17

ESI Highly Cited Papers on the List: 0 Unfold All

WanFang Cited Count:

Chinese Cited Count:

30 Days PV: 1

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