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Abstract:
Two-dimensional in-phase coherently coupled vertical cavity surface emitting laser (VCSEL) array with high beam quality was fabricated by proton implantation. Indium-tin-oxide (ITO) current spreading layer was employed to improve the uniformity of the injection current. This makes a coherent array to operate in in-phase mode even in a relatively larger scale. The appropriate thickness of ITO current spreading layer was obtained by experiment (80 nm). The procedure of proton implantation defined array is considerably simple and low cost. A 3 x 3 in-phase coherently coupled array with 2.4 degrees (1.28 x D.L.) of lobe beamwidth was achieved. It sufficiently demonstrates the advantages of the high beam quality of the in-phase coherently coupled arrays. The output power of the array was up to 4.5 mw under pulse-wave condition.
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IEEE PHOTONICS JOURNAL
ISSN: 1943-0655
Year: 2013
Issue: 6
Volume: 5
2 . 4 0 0
JCR@2022
ESI Discipline: PHYSICS;
JCR Journal Grade:1
CAS Journal Grade:2
Cited Count:
WoS CC Cited Count: 16
SCOPUS Cited Count: 17
ESI Highly Cited Papers on the List: 0 Unfold All
WanFang Cited Count:
Chinese Cited Count:
30 Days PV: 1
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